REACTIONS OF SILICON TETRACHLORIDE AND GERMANIUM TETRACHLORIDE WITH OXYGEN AND OXIDES OF NITROGEN

被引：4

作者：

ATKINS, RM

HOBAN, VA

机构：

来源：

关键词：

D O I：

10.1557/JMR.1989.0641

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：641 / 650

页数：10

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