CONTROL OF DIAMETER IN CZOCHRALSKI AND RELATED CRYSTAL-GROWTH TECHNIQUES

被引:51
作者
HURLE, DTJ
机构
关键词
D O I
10.1016/0022-0248(77)90233-0
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
引用
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页码:473 / 482
页数:10
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共 90 条
  • [1] PROPERTIES OF PROFILED SEMICONDUCTOR SINGLE-CRYSTALS GROWN BY STEPANOVS METHOD
    ANTONOV, PI
    [J]. JOURNAL OF CRYSTAL GROWTH, 1974, 23 (04) : 318 - 322
  • [2] ANTONOV PI, 1973, B ACAD SCI USSR 37, P62
  • [3] ANTONOV PI, 1972, B ACAD SCI USSR 36, P443
  • [4] ANTONOV PI, 1971, B ACAD SCI USSR 35, P409
  • [5] ANTONOV PI, 1969, B ACAD SCI USSR 33, P1813
  • [6] ANTONOV PI, 1972, B ACAD SCI USSR 36, P457
  • [7] ANTONOV PI, 1969, B ACAD SCI USSR PHYS, V33, P1805
  • [8] ANTONOV PI, 1968, GROWTH CRYSTALS A, V6, P145
  • [9] Bachmann K. J., 1970, Journal of Crystal Growth, V7, P290, DOI 10.1016/0022-0248(70)90053-9
  • [10] DEVELOPMENTS IN WEIGHING METHOD OF AUTOMATIC CRYSTAL PULLING
    BARDSLEY, W
    COCKAYNE, B
    GREEN, GW
    HURLE, DTJ
    JOYCE, GC
    ROSLINGTON, JM
    TUFTON, PJ
    WEBBER, HC
    HEALEY, M
    [J]. JOURNAL OF CRYSTAL GROWTH, 1974, 24 (OCT) : 369 - 373