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HIGH-PERFORMANCE INP/GA0.47IN0.53AS/INP METAL-SEMICONDUCTOR-METAL PHOTODETECTORS WITH A STRAINED AL0.1IN0.9P BARRIER ENHANCEMENT LAYER
被引:10
作者:
CHAN, PT
[1
]
CHOY, HS
[1
]
SHU, C
[1
]
HSU, CC
[1
]
机构:
[1] CHINESE UNIV HONG KONG,DEPT ELECTR ENGN,SHA TIN,HONG KONG
关键词:
D O I:
10.1063/1.115026
中图分类号:
O59 [应用物理学];
学科分类号:
摘要:
A reduction in the dark current and an enhancement of the breakdown voltage have been observed in interdigitated InP/Ga0.47In0.53As/InP metal-semiconductor-metal photodetectors when a cap layer of Al0.1In0.9P was grown on the epitaxial structure to increase the Schottky barrier. The devices had a de responsivity of 0.32 A/W and an intrinsic response faster than 74 ps. (C) 1995 American Institute of Physics.
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页码:1715 / 1717
页数:3
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