EXACT ELLIPSOMETRIC MEASUREMENT OF THICKNESS AND OPTICAL PROPERTIES OF A THIN LIGHT-ABSORBING FILM WITHOUT AUXILIARY MEASUREMENTS

被引:83
作者
PAIK, WK
BOCKRIS, JO
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D O I
10.1016/0039-6028(71)90084-7
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
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页码:61 / &
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