THEORETICAL APPROACH UPON THE KINETIC OF GALLIUM-ARSENIDE EPITAXIAL DEPOSITION BY CVD-OM AND COMPARISON WITH EXPERIMENTAL RESULTS

被引：8

作者：

GAVE, G

LEMETAYER, M

BOUREE, JE

机构：

来源：

REVUE DE PHYSIQUE APPLIQUEE | 1979年 / 14卷 / 10期

关键词：

D O I：

10.1051/rphysap:019790014010087500

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：875 / 886

页数：12

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