PERFORMANCE OF A DIRECTIONAL DETECTOR OF MOLECULAR DENSITY

被引:37
作者
KOBAYASHI, M
TUZI, Y
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1979年 / 16卷 / 02期
关键词
MASS SPECTROMETERS;
D O I
10.1116/1.570057
中图分类号
O59 [应用物理学];
学科分类号
摘要
A directional detector of molecular density was developed and applied to the measurements of angular distributions of desorbed molecules from Mo surfaces and outgassing rates from small test surfaces. The detector is composed of a mass spectrometer installed in a detector chamber and a collimator set on the entrance of the detector chamber. The collimator has two apertures and a pumping surface between them. The performance of the collimator is analyzed and compared with experiment data. The ratio of the incident flux intensities of molecules to the detector coming directly from a test surface to the one of chaotic background molecules, collimation efficiency, depends on the pumping speed of the collimator and the bell jar. When the pumping speed of the collimator is increased by cooling the inner wall and/or deposition of evaporated Ti on it, the collimation efficiency can be increased by the factor of 10**2.
引用
收藏
页码:685 / 688
页数:4
相关论文
共 6 条
[1]   REVIEW OF STICKING COEFFICIENTS AND SORPTION CAPACITIES OF GASES ON TITANIUM FILMS [J].
HARRA, DJ .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (01) :471-474
[2]  
HOLLAND L, 1965, 3 T INT VAC C STUTTG, V2, P141
[3]  
KOBAYASHI M, 1977, 7TH P INT VAC C 3RD, V2, P1023
[4]  
KOMIYA S, J VAC SCI TECHNOL
[5]   MOLECULAR-BEAM SCATTERING FROM (111) PLANE OF SILVER [J].
SALTSBURG, H ;
SMITH, JN .
JOURNAL OF CHEMICAL PHYSICS, 1966, 45 (06) :2175-+
[6]   ANALYSIS OF LOCK-IN DETECTION OF MODULATED MOLECULAR BEAMS SCATTERED FROM SOLID SURFACES [J].
YAMAMOTO, S ;
STICKNEY, RE .
JOURNAL OF CHEMICAL PHYSICS, 1967, 47 (03) :1091-&