ELECTRICAL CHARACTERISTICS OF LOW TEMPERATURE-AL0.3GA0.7AS

被引:25
作者
VERMA, AK [1 ]
TU, J [1 ]
SMITH, JS [1 ]
FUJIOKA, H [1 ]
WEBER, ER [1 ]
机构
[1] UNIV CALIF BERKELEY,DEPT MAT SCI,BERKELEY,CA 94720
关键词
HOPPING CONDUCTION; LOW-TEMPERATURE-GROWN ALGAAS; MBE;
D O I
10.1007/BF02649989
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this work, we present electrical characterizations of n(+) GaAs/low temperature (LT)-Al0.3Ga0.7As/n(+) GaAs resistor structures in which the LT layers are grown at nominal substrate temperatures of 250 and 300 degrees C. The resistivity and V-tfl parameters of these LT-Al0.3Ga0.7As layers are compared with those of LT-GaAs and Al0.3Ga0.7As grown at a normal growth temperature of 720 degrees C. Low-temperature Al0.3Ga0.7As layers exhibit resistivities as high as 10(12) ohm-cm, nearly four orders of magnitude higher than that of LT-GaAs, and V-tfl values as high as 45 V, over twice that of LT-GaAs. We also find that the LT-Al0.3Ga0.7As materials grown at 250 and 300 degrees C appear to show opposite and contradictory trends with respect to resistivity and V-tfl. We propose that this result can be explained by residual. hopping conduction in the 250 degrees C material. Temperature dependent conductivity measurements confirm the presence of a hopping mechanism in LT-Al0.3Ga0.7As grown at 250 degrees C and yield activation energies of 0.77 and 0.95 eV for LT-GaAs and LT-Al0.3Ga0.7As, respectively.
引用
收藏
页码:1417 / 1420
页数:4
相关论文
共 9 条
[1]   INVESTIGATION OF LOW GROWTH TEMPERATURE ALGAAS AND GAAS USING METAL-INSULATOR-SEMICONDUCTOR DIAGNOSTIC STRUCTURES [J].
CAMPBELL, AC ;
CROOK, GE ;
ROGERS, TJ ;
STREETMAN, BG .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1990, 8 (02) :305-307
[2]   STRUCTURAL-PROPERTIES OF AS-RICH GAAS GROWN BY MOLECULAR-BEAM EPITAXY AT LOW-TEMPERATURES [J].
KAMINSKA, M ;
LILIENTALWEBER, Z ;
WEBER, ER ;
GEORGE, T ;
KORTRIGHT, JB ;
SMITH, FW ;
TSAUR, BY ;
CALAWA, AR .
APPLIED PHYSICS LETTERS, 1989, 54 (19) :1881-1883
[3]  
KAMINSKA M, 1992, MATER SCI FORUM, V83, P1033, DOI 10.4028/www.scientific.net/MSF.83-87.1033
[4]  
KAMINSKA M, 1990, PHYSICS SEMICONDUCTO, V1
[5]  
MAHALINGAM K, 1992, APPL PHYS LETT, V60, P3353
[6]   NEW MBE BUFFER USED TO ELIMINATE BACKGATING IN GAAS-MESFETS [J].
SMITH, FW ;
CALAWA, AR ;
CHEN, CL ;
MANFRA, MJ ;
MAHONEY, LJ .
IEEE ELECTRON DEVICE LETTERS, 1988, 9 (02) :77-80
[7]  
Stoneham A M., 1970, PHYS B, V21, P558, DOI DOI 10.1088/0031-9112/21/12/031/PDF
[8]   IMPROVED BREAKDOWN VOLTAGE IN GAAS-MESFETS UTILIZING SURFACE-LAYERS OF GAAS GROWN AT A LOW-TEMPERATURE BY MBE [J].
YIN, LW ;
HWANG, Y ;
LEE, JH ;
KOLBAS, RM ;
TREW, RJ ;
MISHRA, UK .
IEEE ELECTRON DEVICE LETTERS, 1990, 11 (12) :561-563
[9]  
YIN LW, 1992, MATER RES SOC SYMP P, V241, P181