FORMATION OF CHEMICAL-COMPOUNDS AND STRUCTURAL-CHANGES CAUSED BY THE ION-IMPLANTATION OF BORON AND CARBON IN ALPHA-FE FILMS

被引：5

作者：

TREUTLER, CPO

DIENEL, G

HOHMUTH, K

机构：

来源：

THIN SOLID FILMS | 1981年 / 79卷 / 03期

关键词：

D O I：

10.1016/0040-6090(81)90308-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：201 / 205

页数：5

共 11 条

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[10] CHANGES IN PHASE STRUCTURE AND FORMATION OF CHEMICAL COMPOUNDS BY ION-IMPLANTATION OF TANTALUM THIN-FILMS [J].

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