PLASMA OXIDATION

被引：14

作者：

FROMHOLD, AT

机构：

来源：

THIN SOLID FILMS | 1982年 / 95卷 / 04期

关键词：

D O I：

10.1016/0040-6090(82)90035-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：297 / 308

页数：12

相关论文

共 22 条

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[3] BAKER JM, 1978, COMMUNICATION
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[5] GROWTH OF THIN PBO LAYERS ON LEAD FILMS .1. EXPERIMENT
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[6] SINGLE CARRIER STEADY-STATE THEORY FOR FORMATION OF ANODIC FILMS UNDER CONDITIONS OF HIGH SPACE-CHARGE IN VERY LARGE ELECTRIC-FIELDS
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[8] NON-SIMULTANEOUS PLACE EXCHANGE - MICROSCOPIC HIGH-FIELD TRANSPORT MECHANISM IN SOLIDS
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[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1980, 127 (02) : 411 - 425
[9] OXIDE-GROWTH IN AN RF PLASMA
FROMHOLD, AT
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[J]. JOURNAL OF APPLIED PHYSICS, 1980, 51 (12) : 6377 - 6392
[10] FROMHOLD AT, 1976, THEORY METAL OXIDATI, V1, pCH8