COMPACT CONFOCAL INTERFERENCE MICROSCOPY

被引:13
作者
JUSKAITIS, R
WILSON, T
REA, NP
机构
[1] Department of Engineering Science, University of Oxford, Oxford, OX1 3PJ, Parks Road
关键词
D O I
10.1016/0030-4018(94)90756-0
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A compact form of confocal interference microscope using a single mode HeNe laser is described. Confocal operation is ensured by permitting the image light to re-enter the laser cavity. The confocal signal is detected as a modulation on the lasing power. Interference contrast images with lateral resolution 0.4 mum and height resolution 0.1 nm have been obtained using both dc and modulation feedback techniques.
引用
收藏
页码:167 / 177
页数:11
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