SELF-CONSISTENT MODELING OF SURFACE-WAVE PRODUCED DISCHARGES AT LOW-PRESSURES

被引:61
作者
SA, AB [1 ]
FERREIRA, CM [1 ]
PASQUIERS, S [1 ]
BOISSELAPORTE, C [1 ]
LEPRINCE, P [1 ]
MAREC, J [1 ]
机构
[1] UNIV PARIS 11, CTR ORSAY, CNRS, PHYS GAZ & PLASMAS LAB, F-91405 ORSAY, FRANCE
关键词
D O I
10.1063/1.349137
中图分类号
O59 [应用物理学];
学科分类号
摘要
A self-consistent theory of a low-pressure gas discharge sustained by a surface wave (SW) is presented which provides a complete description of the plasma density (n(e)) and SW-field distribution both in the radial (r) and the axial (z) directions. The theory is based on a complete set of equations including Maxwell's equations and the boundary conditions for the SW-field, the electron Boltzmann equation which yields local collisional and transport data versus the SW-electric field E, and the continuity and momentum transfer equations for the electrons and the ions. For given operating frequency, gas density, setup dimensions and total incident power P(i)(O), the theory enables the determination of: (i) the SW-dispersion relation; (ii) n(e)(r,z) and E(r,z); (iii) P(i)(z); and (iv) theta(z), the radially averaged mean absorbed power per electron. It is shown that EBAR(z), the radially averaged field in the plasma, and theta(z) are practically constant along z, in spite of the fact that P(i)(z) steadily decreases. Comparison with experiment is made for SW discharges in Ar operated at the frequencies of 433 MHz and 2.45 GHz.
引用
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页码:4147 / 4158
页数:12
相关论文
共 44 条
[11]  
Dervisevic E., 1983, XVI International Conference on Phenomena in Ionized Gases, P468
[12]  
FERRARIO CM, 1986, HDB HYPERTENSION, P431
[13]  
FERREIRA CM, 1990, NATO ADV SCI I B-PHY, V220, P187
[14]  
FERREIRA CM, 1983, J PHYS D APPL PHYS, V16, P1673, DOI 10.1088/0022-3727/16/9/013
[15]   THEORY OF A PLASMA-COLUMN SUSTAINED BY A SURFACE-WAVE [J].
FERREIRA, CM .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1981, 14 (10) :1811-1830
[16]   THE SIMILARITY LAWS FOR THE MAINTENANCE FIELD AND THE ABSORBED POWER PER ELECTRON IN LOW-PRESSURE SURFACE-WAVE PRODUCED PLASMAS AND THEIR EXTENSION TO HF PLASMAS IN GENERAL [J].
FERREIRA, CM ;
MOISAN, M .
PHYSICA SCRIPTA, 1988, 38 (03) :382-399
[17]   MODELING OF LOW-PRESSURE MICROWAVE DISCHARGES IN AR, HE, AND O-2 - SIMILARITY LAWS FOR THE MAINTENANCE FIELD AND MEAN POWER TRANSFER [J].
FERREIRA, CM ;
ALVES, LL ;
PINHEIRO, M ;
SA, AB .
IEEE TRANSACTIONS ON PLASMA SCIENCE, 1991, 19 (02) :229-239
[18]   CHARACTERISTICS OF HIGH-FREQUENCY AND DIRECT-CURRENT ARGON DISCHARGES AT LOW-PRESSURES - A COMPARATIVE-ANALYSIS [J].
FERREIRA, CM ;
LOUREIRO, J .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1984, 17 (06) :1175-1188
[19]   AXIAL ELECTRON-DENSITY AND WAVE POWER DISTRIBUTIONS ALONG A PLASMA-COLUMN SUSTAINED BY THE PROPAGATION OF A SURFACE MICROWAVE [J].
GLAUDE, VMM ;
MOISAN, M ;
PANTEL, R ;
LEPRINCE, P ;
MAREC, J .
JOURNAL OF APPLIED PHYSICS, 1980, 51 (11) :5693-5698
[20]   WAVE-PROPAGATION AND DIAGNOSTICS IN ARGON SURFACE-WAVE DISCHARGES UP TO 100-TORR [J].
GRANIER, A ;
BOISSELAPORTE, C ;
LEPRINCE, P ;
MAREC, J ;
NGHIEM, P .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1987, 20 (02) :204-209