TRANSPORT OF DUST PARTICLES IN GLOW-DISCHARGE PLASMAS

被引：673

作者：

BARNES, MS

KELLER, JH

FORSTER, JC

ONEILL, JA

COULTAS, DK

机构：

[1] IBM East Fishkill Facility, Hopewell Junction, NY 12533-0999, Route 52, B/300

来源：

PHYSICAL REVIEW LETTERS | 1992年 / 68卷 / 03期

关键词：

D O I：

10.1103/PhysRevLett.68.313

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

A theory is presented for the transport of dust particles in glow-discharge plasmas. The forces which act on the negatively charged dust particles are examined and estimated. The dominant force is shown to be dependent upon the particle size and location within the discharge.

引用

页码：313 / 316

页数：4

共 21 条

[11] COULOMB SOLID OF SMALL PARTICLES IN PLASMAS [J].

IKEZI, H .

PHYSICS OF FLUIDS, 1986, 29 (06) :1764-1766

[12]

JELLUM GM, IN PRESS APPL PHYS L

[13]

JELLUM GM, IN PRESS J APPL PHYS

[14] The role of attractive and repulsive forces in the formation of tactoids, thixotropic gels, protein crystals and coacervates [J].

Langmuir, I .

JOURNAL OF CHEMICAL PHYSICS, 1938, 6 (12) :873-896

[15]

MCCAUGHEY MJ, 1991, B AM PHYS SOC, V36, P219

[16] INSITU INFRARED DIAGNOSTICS OF PARTICLE FORMING ETCH PLASMAS [J].

ONEILL, JA ;

SINGH, J ;

GIFFORD, GG .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (03) :1716-1721

[17]

Schott L., 1968, PLASMA DIAGNOSTICS

[18] INSITU LASER DIAGNOSTIC STUDIES OF PLASMA-GENERATED PARTICULATE CONTAMINATION [J].

SELWYN, GS ;

SINGH, J ;

BENNETT, RS .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (04) :2758-2765

[19]

SELWYN GS, 1990, IN PRESS J VAC SCI T

[20]

TRUBNIKOV B, 1965, REV PLASMA PHYSICS, V1

← 1 2 3 →