A SIMPLE LATERAL FORCE SENSING TECHNIQUE FOR NEAR-FIELD MICROPATTERN GENERATION

被引：33

作者：

SHCHEMELININ, A

RUDMAN, M

LIEBERMAN, K

LEWIS, A

机构：

[1] Department of Applied Physics, Hebrew University of Jerusalem, Givat Ram Campus

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1993年 / 64卷 / 12期

关键词：

D O I：

10.1063/1.1144280

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We present a simple and general purpose implementation for monitoring the lateral forces between a near-field optical probe and a surface. A feedback system based on this technique has been incorporated into a near-field optical fabrication system based on heatless material removal with an argon fluoride excimer laser. This has allowed the construction of an instrument that is capable of directly patterning a wide variety of materials with a resolution of less than 50 nm.

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页码：3538 / 3541

页数：4

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