PHYSICAL PROPERTIES OF SPUTTERED AMORPHOUS GE - ROLE OF DEPOSITION RATE

被引：13

作者：

KOC, S

ZAVETOVA, M

ZEMEK, J

RENNER, O

机构：

来源：

CZECHOSLOVAK JOURNAL OF PHYSICS SECTION B | 1972年 / B 22卷 / 12期

关键词：

D O I：

10.1007/BF01689909

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：1296 / &

共 24 条

[1]

BARNA A, 1971, 4 P INT C AM LIQ SEM

[2]

BAUER RS, 1971, 4 P INT C AM LIQ SEM

[3] EFFECT OF DEPOSITION PARAMETERS ON STRUCTURE AND RESISTIVITY OF MOLYBDENUM FILMS [J].

BOSNELL, JR ;

VOISEY, UC .

THIN SOLID FILMS, 1970, 6 (02) :107-&

[4] STRUCTURAL, OPTICAL, AND ELECTRICAL PROPERTIES OF AMORPHOUS SILICON FILMS [J].

BRODSKY, MH ;

TITLE, RS ;

WEISER, K ;

PETTIT, GD .

PHYSICAL REVIEW B, 1970, 1 (06) :2632-&

[5] ELECTRICAL AND OPTICAL PROPERTIES OF AMORPHOUS GERMANIUM [J].

CLARK, AH .

PHYSICAL REVIEW, 1967, 154 (03) :750-&

[6] A HIGH DENSITY FORM OF AMORPHOUS GE [J].

DONOVAN, TM ;

ASHLEY, EJ ;

SPICER, WE .

PHYSICS LETTERS A, 1970, A 32 (02) :85-&

[7] HIGH-RESOLUTION ELECTRON MICROSCOPE OBSERVATION OF VOIDS IN AMORPHOUS GE [J].

DONOVAN, TM ;

HEINEMAN.K .

PHYSICAL REVIEW LETTERS, 1971, 27 (26) :1794-&

[8]

JONSCHER AK, 1972, THIN SOL FILMS, V9, P67

[9] ELECTRICAL AND OPTICAL PROPERTIES OF ANNEALED AMORPHOUS GE [J].

KOC, S ;

ZAVETOVA, M ;

ZEMEK, J .

THIN SOLID FILMS, 1972, 10 (02) :165-&

[10] DENSITY OF AMORPHOUS GE [J].

LIGHT, TB .

PHYSICAL REVIEW LETTERS, 1969, 22 (19) :999-&

← 1 2 3 →