SHALLOW DIFFUSION OF ZINC INTO GAAS FOR OPTICAL-WAVEGUIDE MODULATORS

被引：4

作者：

TADA, K

SUZUKI, T

YAMANE, K

机构：

来源：

THIN SOLID FILMS | 1981年 / 83卷 / 02期

关键词：

D O I：

10.1016/0040-6090(81)90682-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：289 / 293

页数：5

共 17 条

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