YBA2CU3O(7-X) BASED SUPERCONDUCTING THIN-FILMS BY MULTITARGET SPUTTERING

被引：1

作者：

BOUTELOUP, E

MERCEY, B

POULLAIN, G

BROUSSE, T

MURRAY, H

RAVEAU, B

机构：

来源：

REVUE DE PHYSIQUE APPLIQUEE | 1990年 / 25卷 / 02期

关键词：

D O I：

10.1051/rphysap:01990002502018300

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：183 / 187

页数：5

共 10 条

[1] LOW-TEMPERATURE PROCESS FOR THE PREPARATION OF HIGH-TC SUPERCONDUCTING THIN-FILMS
ADACHI, H
HIROCHI, K
SETSUNE, K
KITABATAKE, M
WASA, K
[J]. APPLIED PHYSICS LETTERS, 1987, 51 (26) : 2263 - 2265
[2] EFFECT OF THE POST-DEPOSITION PROCESSING AMBIENT ON THE PREPARATION OF SUPERCONDUCTING YBA2CU3O7-X COEVAPORATED THIN-FILMS USING A BAF2 SOURCE
CHAN, SW
BAGLEY, BG
GREENE, LH
GIROUD, M
FELDMANN, WL
JENKIN, KR
WILKINS, BJ
[J]. APPLIED PHYSICS LETTERS, 1988, 53 (15) : 1443 - 1445
[3] REACTIVE MAGNETRON SPUTTERING OF THIN-FILM SUPERCONDUCTOR YBA2CU3O7-CHI
CHAR, K
KENT, AD
KAPITULNIK, A
BEASLEY, MR
GEBALLE, TH
[J]. APPLIED PHYSICS LETTERS, 1987, 51 (17) : 1370 - 1372
[4] Glang LI, 1970, HDB THIN FILM TECHNO, P4
[5] Y-BA-CU-O FILMS BY RF MAGNETRON SPUTTERING USING SINGLE COMPOSITE TARGETS - SUPERCONDUCTING AND STRUCTURAL-PROPERTIES
LIOU, SH
HONG, M
KWO, J
DAVIDSON, BA
CHEN, HS
NAKAHARA, S
BOONE, T
FELDER, RJ
[J]. APPLIED PHYSICS LETTERS, 1988, 52 (20) : 1735 - 1737
[6] LOW-TEMPERATURE PREPARATION OF AS-SPUTTERED SUPERCONDUCTING YBACUO THIN-FILMS BY MAGNETRON SPUTTERING
MIURA, T
TERASHIMA, Y
SAGOI, M
KUBO, K
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1988, 27 (07): : L1260 - L1261
[7] CHARACTERIZATION OF THIN-FILMS OF Y-BA-CU-O ON OXIDIZED SILICON WITH A ZIRCONIA BUFFER LAYER
MOGROCAMPERO, A
TURNER, LG
HALL, EL
BURRELL, MC
[J]. APPLIED PHYSICS LETTERS, 1988, 52 (24) : 2068 - 2070
[8] AS-DEPOSITED SUPERCONDUCTING BA2YCU3O7-Y FILMS USING ECR ION-BEAM OXIDATION
MORIWAKI, K
ENOMOTO, Y
KUBO, S
MURAKAMI, T
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1988, 27 (11): : L2075 - L2077
[9] SPUTTER SYNTHESIS OF BA2YCU3OY AS-DEPOSITED SUPERCONDUCTING THIN-FILMS FROM STOICHIOMETRIC TARGET - A MECHANISM OF COMPOSITIONAL DEVIATION AND ITS CONTROL
TERADA, N
IHARA, H
JO, M
HIRABAYASHI, M
KIMURA, Y
MATSUTANI, K
HIRATA, K
OHNO, E
SUGISE, R
KAWASHIMA, F
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1988, 27 (04): : L639 - L642
[10] CROSS-SECTIONAL TEM OBSERVATION OF BA2YCU3O7-X FILM ON SRTIO3
TOMITA, M
HAYASHI, T
TAKAOKA, H
ISHII, Y
ENOMOTO, Y
MURAKAMI, T
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1988, 27 (04): : L636 - L638

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