RELATIONSHIP BETWEEN SUBSTRATE SURFACE CHEMISTRY AND ADHESION OF THIN-FILMS

被引：19

作者：

SUNDAHL, RC

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1972年 / 9卷 / 01期

关键词：

D O I：

10.1116/1.1316548

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：181 / &

共 16 条

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[7] PALMBERG P, PRIVATE COMMUNICATIO
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[10] EFFECTS OF DOPANTS ON DEFECT STRUCTURE OF SINGLE-CRYSTAL ALUMINUM OXIDE
RASMUSSEN, JJ
KINGERY, WD
[J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1970, 53 (08) : 436 - +