ELECTRON-ENERGY-LOSS SPECTROMETRY MAPPING

被引：106

作者：

COLLIEX, C

TENCE, M

LEFEVRE, E

MORY, C

GU, H

BOUCHET, D

JEANGUILLAUME, C

机构：

[1] Laboratoire de Physique des Solides Associé au CNRS, Université Paris-Sud, Orsay, F-91405

来源：

MIKROCHIMICA ACTA | 1994年 / 114卷

关键词：

ELECTRON MICROSCOPY; NANOANALYSIS; ELECTRON ENERGY LOSS SPECTRUM; IMAGE-SPECTRUM AQUISITION AND PROCESSING;

D O I：

10.1007/BF01244534

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Among electron beam microanalytical techniques, electron energy loss spectrometry (EELS) offers unique advantages in terms of information content, sensitivity, limits of detection. This paper describes new methods and tools for acquiring families of spectra over many pixels on the specimen, i.e. spectrum-images, and for processing them. Applications in different fields of research, both in materials science and in life sciences, demonstrate the potential impact of the technique for characterizing nano-sized structures.

引用

页码：71 / 87

页数：17

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