FILM FORMATION AND STRUCTURE-SENSITIVE PROPERTIES - AN INTRODUCTION

被引:4
作者
BEHRNDT, KH
机构
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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1969年 / 6卷 / 04期
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D O I
10.1116/1.1315651
中图分类号
O59 [应用物理学];
学科分类号
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页码:439 / &
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