LIMITS OF COMPOSITION ACHIEVABLE BY ION-IMPLANTATION

[1] Andersen H. H., 1973, Radiation Effects, V19, P139, DOI 10.1080/00337577308232233

[2] HEAVY-ION SPUTTERING YIELDS OF GOLD - FURTHER EVIDENCE OF NONLINEAR EFFECTS [J]. JOURNAL OF APPLIED PHYSICS, 1975, 46 (06) : 2416 - 2422

[3] ANOMALOUSLY HIGH COLLECTION OF COPPER IONS IMPLANTED IN ALUMINIUM [J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1971, 4 (03): : 663 - &

[4] ION SORPTION IN PRESENCE OF SPUTTERING [J]. PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON, 1962, 79 (508): : 299 - &

[5] Carter G., 1968, ION BOMBARDMENT SOLI

[6] SURFACE ENRICHMENT OF COPPER DUE TO KEV XE SPUTTERING OF AN AL-CU MIXTURE [J]. JOURNAL OF APPLIED PHYSICS, 1976, 47 (10) : 4500 - 4503

[7] Czanderna A.W., 1975, METHODS SURFACE ANAL

[8] DEARNALEY G, 1975, NEW USES ION ACCELER, pCH5

[9] GIANI E, 1978, THIN FILM PHENOMENA, P443

[10] HIRVONEN JK, UNPUBLISHED

[1] Andersen H. H., 1973, Radiation Effects, V19, P139, DOI 10.1080/00337577308232233

[2] HEAVY-ION SPUTTERING YIELDS OF GOLD - FURTHER EVIDENCE OF NONLINEAR EFFECTS [J]. JOURNAL OF APPLIED PHYSICS, 1975, 46 (06) : 2416 - 2422

[3] ANOMALOUSLY HIGH COLLECTION OF COPPER IONS IMPLANTED IN ALUMINIUM [J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1971, 4 (03): : 663 - &

[4] ION SORPTION IN PRESENCE OF SPUTTERING [J]. PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON, 1962, 79 (508): : 299 - &

[5] Carter G., 1968, ION BOMBARDMENT SOLI

[6] SURFACE ENRICHMENT OF COPPER DUE TO KEV XE SPUTTERING OF AN AL-CU MIXTURE [J]. JOURNAL OF APPLIED PHYSICS, 1976, 47 (10) : 4500 - 4503

[7] Czanderna A.W., 1975, METHODS SURFACE ANAL

[8] DEARNALEY G, 1975, NEW USES ION ACCELER, pCH5

[9] GIANI E, 1978, THIN FILM PHENOMENA, P443

[10] HIRVONEN JK, UNPUBLISHED