LIMITS OF COMPOSITION ACHIEVABLE BY ION-IMPLANTATION

被引:50
作者
LIAU, ZL
MAYER, JW
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 05期
关键词
D O I
10.1116/1.569820
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:1629 / 1635
页数:7
相关论文
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