MECHANISMS OF RADICAL PRODUCTION IN RADIOFREQUENCY DISCHARGES OF CF3CL, CF3BR, AND CERTAIN OTHER PLASMA ETCHANTS - SPECTRUM OF A TRANSIENT SPECIES

被引：37

作者：

FLAMM, DL

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1980年 / 51卷 / 11期

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D O I：

10.1063/1.327567

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：5688 / 5692

页数：5

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[5] MODEL AND APPARATUS FOR ELECTRICAL-DISCHARGE EXPERIMENTS
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[6] FLAMM DL, 1979, SOLID STATE TECHNOL, V22, P109
[7] REACTION OF HYDROGEN-CHLORIDE WITH OXYGEN IN AN ELECTRODELESS RADIOFREQUENCY DISCHARGE
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[J]. INDUSTRIAL & ENGINEERING CHEMISTRY FUNDAMENTALS, 1973, 12 (03): : 276 - 286
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