MECHANISMS OF RADICAL PRODUCTION IN RADIOFREQUENCY DISCHARGES OF CF3CL, CF3BR, AND CERTAIN OTHER PLASMA ETCHANTS - SPECTRUM OF A TRANSIENT SPECIES

被引：37

作者：

FLAMM, DL

机构：

来源：

关键词：

D O I：

10.1063/1.327567

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：5688 / 5692

页数：5

共 36 条

[11] EMISSION-SPECTRA AND CHEMICAL-REACTIONS OF FLUORINATED BENZENE-DERIVATIVES IN A HIGH-FREQUENCY DISCHARGE
GILBERT, R
THEORET, A
[J]. JOURNAL OF PHYSICAL CHEMISTRY, 1976, 80 (09) : 1017 - 1022
[12] PHOTOLYSIS OF MIXTURES OF ACETONE AND HEXAFLUOROACETONE - COMBINATION REACTIONS OF METHYL AND TRIFLUOROMETHYL RADICALS
GILES, RD
WHITTLE, E
[J]. TRANSACTIONS OF THE FARADAY SOCIETY, 1965, 61 (511P): : 1425 - &
[13] HARLAND PW, 1974, J CHEM PHYS, V61, P1631
[14] Harrison G. R., 1969, MIT WAVELENGTH TABLE
[15] HEICKLEN J, 1969, ADV PHOTOCHEM, V7, P57
[16] KAY E, 1976, VIDE, V183, P89
[17] KODA S, 1978, CHEM PHYS LETT, V55, P353, DOI 10.1016/0009-2614(78)87037-7
[18] THE ABSORPTION SPECTRUM OF CF2
LAIRD, RK
ANDREWS, EB
BARROW, RF
[J]. TRANSACTIONS OF THE FARADAY SOCIETY, 1950, 46 (10): : 803 - &
[19] ON THE ABSORPTION SPECTRUM OF CF2 AND ITS VIBRATIONAL ANALYSIS
MANN, DE
THRUSH, BA
[J]. JOURNAL OF CHEMICAL PHYSICS, 1960, 33 (06) : 1732 - 1734
[20] RADIATION-CHEMISTRY OF CF4-CCI4 MIXTURES IN GAS-PHASE
MARCOTTE, RE
HANRAHAN, RJ
[J]. JOURNAL OF PHYSICAL CHEMISTRY, 1972, 76 (25) : 3734 - &