ULTRAVIOLET-LIGHT-ENHANCED REACTION OF OXYGEN WITH GALLIUM-ARSENIDE SURFACES

被引:33
作者
YU, CF
SCHMIDT, MT
PODLESNIK, DV
YANG, ES
OSGOOD, RM
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1988年 / 6卷 / 03期
关键词
D O I
10.1116/1.575101
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
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页码:754 / 756
页数:3
相关论文
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