ELECTRICAL AND INFRARED SPECTROSCOPIC INVESTIGATIONS OF OXYGEN-RELATED DONORS IN SILICON

被引:113
作者
WRUCK, D [1 ]
GAWORZEWSKI, P [1 ]
机构
[1] AKAD WISSENSCH DDR,INST PHYS,WERKSTOFFBEARBEITUNG,DDR-1162 BERLIN,GER DEM REP
来源
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1979年 / 56卷 / 02期
关键词
D O I
10.1002/pssa.2210560220
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Silicon crystals containing up to 1015 cm−3 of „oxygen donors” are investigated by electrical and infrared spectroscopic measurements. The results obtained can be understood phenomenologically by the occurrence of several species of doubly charged donors, whose excited states can be fairly well described by the effective mass approximation, whereas the ground state energies are varying in such a way that, with increasing total donor concentration, species with lower ionization energies are formed at the expense of preceding ones having higher ionization energies. Copyright © 1979 WILEY‐VCH Verlag GmbH & Co. KGaA
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页码:557 / 564
页数:8
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