LOCAL MODIFICATION OF ORGANIC-DYE MATERIALS BY DIELECTRIC-BREAKDOWN

Local modifications by dielectric breakdown of organic dye film are made with nanoseconds pulses. Organic dye films (5.8 and 10 nm thicknesses) are spin coated on silicon substrates. A very light load (less than 300 nN) contact profile meter with a diamond tip (100 nm radius) made conductive by ion implantation are used. There are two types of modifications: the depression type and the projection type. It is thought that a modification of the depression type occurs as a result of film destruction, and a modification of projection type is caused by the adhesion of contaminants. © 1990, American Vacuum Society. All rights reserved.