ANGULAR-DISTRIBUTION OF SI ATOMS SPUTTERED BY KEV AR+ IONS

被引：46

作者：

OKUTANI, T

SHIKATA, M

ICHIMURA, S

SHIMIZU, R

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1980年 / 51卷 / 05期

关键词：

D O I：

10.1063/1.327957

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2884 / 2887

页数：4

共 12 条

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