EFFECT OF H-2 ON AN ARGON DISCHARGE FOR PLANAR MAGNETRON SPUTTERING

被引：7

作者：

MANIV, S ^{[1
]}

WESTWOOD, WD ^{[1
]}

机构：

[1] BELL NO RES,BOX 2511,STN C,OTTAWA K1Y 4H7,ONTARIO,CANADA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1980年 / 17卷 / 01期

关键词：

D O I：

10.1116/1.570466

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：403 / 406

页数：4

共 25 条

[1] ACTON JR, 1963, COLD CATHODE DISCHAR, P227
[2] REACTIONS OF HE2+, NE2+, AR2+, AND RARE-GAS HYDRIDE IONS WITH HYDROGEN AT 200 DEGREES K
ADAMS, NG
BOHME, DK
FERGUSON, EE
[J]. JOURNAL OF CHEMICAL PHYSICS, 1970, 52 (10) : 5101 - &
[3] AGUILANTI V, 1965, J CHEM PHYS, V43, P1969
[4] COBURN JW, 1971, SOLID STATE TECHNOL, V14, P49
[5] Fraser D. B., 1978, THIN FILM PROCESSES
[6] REACTIONS OF GASEOUS MOLECULE IONS WITH GASEOUS MOLECULES .5. THEORY
GIOUMOUSIS, G
STEVENSON, DP
[J]. JOURNAL OF CHEMICAL PHYSICS, 1958, 29 (02) : 294 - 299
[7] HARRISON AG, 1966, ADV CHEM, V58, P158
[8] COPPER SULFIDE FILMS DEPOSITED BY CYLINDRICAL MAGNETRON REACTIVE SPUTTERING
JONATH, AD
ANDERSON, WW
THORNTON, JA
CORNOG, DG
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02): : 200 - 203
[9] KAMPWIRTH RT, 1978, 25TH NAT S AM VAC SO
[10] MASS SPECTROMETRY OF IONS IN GLOW DISCHARGES .1. APPARATUS AND ITS APPLICATION TO POSITIVE COLUMN IN RARE GASES
KNEWSTUBB, PF
TICKNER, AW
[J]. JOURNAL OF CHEMICAL PHYSICS, 1962, 36 (03) : 674 - &