INVESTIGATION OF THERMALLY OXIDISED SILICON SURFACES USING METAL-OXIDE-SEMICONDUCTOR STRUCTURES

被引:458
作者
GROVE, AS
DEAL, BE
SNOW, EH
SAH, CT
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D O I
10.1016/0038-1101(65)90046-8
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:145 / +
页数:1
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共 32 条
[1]   EFFECTIVE MOBILITIES OF SURFACE CARRIERS IN GERMANIUM [J].
ALBERS, WA .
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1962, 23 (SEP) :1249-&
[2]   COMPARISON OF PHOTOELECTRIC PROPERTIES OF CLEAVED HEATED + SPUTTERED SILICON SURFACES [J].
ALLEN, FG ;
GOBELI, GW .
JOURNAL OF APPLIED PHYSICS, 1964, 35 (3P1) :597-&
[3]   WORK FUNCTION, PHOTOELECTRIC THRESHOLD, AND SURFACE STATES OF ATOMICALLY CLEAN SILICON [J].
ALLEN, FG ;
GOBELI, GW .
PHYSICAL REVIEW, 1962, 127 (01) :150-&
[4]  
ARCHER RJ, 1963, ANN NY ACAD SCI, V101, P697
[5]   STABILIZATION OF SILICON SURFACES BY THERMALLY GROWN OXIDES [J].
ATALLA, MM ;
TANNENBAUM, E ;
SCHEIBNER, EJ .
BELL SYSTEM TECHNICAL JOURNAL, 1959, 38 (03) :749-783
[6]  
ATALLA MM, 1960, PROPERTIES ELEMENTAL, V5, P163
[7]   N-TYPE SURFACE CONDUCTIVITY ON P-TYPE GERMANIUM [J].
BROWN, WL .
PHYSICAL REVIEW, 1953, 91 (03) :518-527
[8]   SURFACE MAGNETOCONDUCTIVITY EXPERIMENTS ON SILICON [J].
COOVERT, RE .
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1961, 21 (1-2) :87-98
[9]  
DEAL BE, TO BE PUBLISHED