RESISTIVITY BEHAVIOR AND PHASE-TRANSFORMATIONS IN BETA-W THIN-FILMS

被引:36
作者
PETROFF, PM [1 ]
REED, WA [1 ]
机构
[1] BEL TEL LAB INC,MURRAY HILL,NJ 07874
关键词
D O I
10.1016/0040-6090(74)90092-3
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:73 / 81
页数:9
相关论文
共 6 条
[1]   SUPERCONDUCTIVITY IN EVAPORATED TUNGSTEN FILMS [J].
BASAVAIAH, S ;
POLLACK, SR .
APPLIED PHYSICS LETTERS, 1968, 12 (08) :259-+
[2]   SUPERCONDUCTIVITY IN BETA-TUNGSTEN FILMS [J].
BASAVAIAH, S ;
POLLACK, SR .
JOURNAL OF APPLIED PHYSICS, 1968, 39 (12) :5548-+
[3]   SUPERCONDUCTIVITY IN FILMS OF BETA TUNGSTEN AND OTHER TRANSITION METALS [J].
BOND, WL ;
COOPER, AS ;
ANDRES, K ;
HULL, GW ;
GEBALLE, TH ;
MATTHIAS, BT .
PHYSICAL REVIEW LETTERS, 1965, 15 (06) :260-&
[4]  
FEINSTEIN LG, TO BE PUBLISHED
[5]   MICROSTRUCTURE, GROWTH, RESISTIVITY, AND STRESSES IN THIN TUNGSTEN FILMS DEPOSITED BY RF SPUTTERING [J].
PETROFF, P ;
SHENG, TT ;
SINHA, AK ;
ROZGONYI, GA ;
ALEXANDER, FB .
JOURNAL OF APPLIED PHYSICS, 1973, 44 (06) :2545-2554
[6]  
WAGNER RK, IN PRESS