CHARGE TRAPPING IN PLASMA-POLYMERIZED THIN-FILMS

被引：7

作者：

KLEMBERGSAPIEHA, JE

SAPIEHA, S

WERTHEIMER, MR

YELON, A

机构：

来源：

APPLIED PHYSICS LETTERS | 1980年 / 37卷 / 01期

关键词：

D O I：

10.1063/1.91678

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：104 / 105

页数：2

共 9 条

[1]

BELL AT, 1979, ACS108 S SER

[2] GENERATION OF LARGE VOLUME MICROWAVE PLASMAS [J].

BOSISIO, RG ;

WERTHEIMER, MR ;

WEISSFLOCH, CF .

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1973, 6 (07) :628-630

[3] SURVEY OF LOW-TEMPERATURE RF PLASMA POLYMERIZATION AND PROCESSING [J].

HAVENS, MR ;

BIOLSI, ME ;

MAYHAN, KG .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (02) :575-584

[4] INSULATOR THIN FILMS FORMED BY GLOW DISCHARGE AND RADIATION TECHNIQUES [J].

MEARNS, AM .

THIN SOLID FILMS, 1969, 3 (03) :201-&

[5]

SAPIEHA S, UNPUBLISHED

[6] GLOW DISCHARGE POLYMERIZATION .1. RATES AND MECHANISMS OF POLYMER FORMATION [J].

WESTWOOD, AR .

EUROPEAN POLYMER JOURNAL, 1971, 7 (04) :363-&

[7] GLOW DISCHARGE POLYMERIZATION .2. STR1CTURE OF GLOW DISCHARGE POLYMERS [J].

WESTWOOD, AR .

EUROPEAN POLYMER JOURNAL, 1971, 7 (04) :377-&

[8]

WROBEL A, J MACROMOL SCI CHEM

[9] POLYMERIZATION OF ORGANOSILICONES IN MICROWAVE DISCHARGES [J].

WROBEL, AM ;

WERTHEIMER, MR ;

DIB, J ;

SCHREIBER, HP .

JOURNAL OF MACROMOLECULAR SCIENCE-CHEMISTRY, 1980, A14 (03) :321-337

← 1 →