CHANNELING OF B AND ARSENIC NEAR THE SILICON (001) AXIS

被引:8
作者
HAUTALA, M
机构
关键词
D O I
10.1016/0168-583X(86)90256-9
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
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页码:75 / 77
页数:3
相关论文
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