IONIC SPECIES RESPONSIBLE FOR THE PLASMA ANODIZATION OF SILICON

被引：18

作者：

BARLOW, KJ ^{[1
]}

KIERMASZ, A ^{[1
]}

ECCLESTON, W ^{[1
]}

MORUZZI, JL ^{[1
]}

机构：

[1] UNIV LIVERPOOL,DEPT ELECT ENGN & ELECTR,LIVERPOOL L69 3BX,ENGLAND

来源：

关键词：

D O I：

10.1063/1.100571

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：57 / 59

页数：3

共 7 条

[1]

Albritton DL., 1978, ATOM DATA NUCL DATA, V22, P1, DOI DOI 10.1016/0092-640X(78)90027-X

[2] AN IMPROVED THEORY FOR THE PLASMA ANODIZATION OF SILICON [J].

BARLOW, K ;

KIERMASZ, A ;

ECCLESTON, W .

IEE PROCEEDINGS-I COMMUNICATIONS SPEECH AND VISION, 1985, 132 (04) :181-183

[3]

KIERMASZ A, 1983, THESIS U LIVERPOOL

[4]

MORUZZI JL, 1966, J CHEM PHYS, V45, P4612

[5]

OHANLON JF, 1971, APPL PHYS LETT, V18, P544

[6] ROLE OF PLASMA NEGATIVE-IONS IN PLASMA ANODIZATION [J].

OLIVE, G ;

YOUNG, L ;

PULFREY, DL .

PARKES, DA .

JOURNAL OF THE CHEMICAL SOCIETY-FARADAY TRANSACTIONS I, 1972, 68 (11) :2103-&