DETERMINATION OF LOCAL COMPOSITION IN CO-CR FILMS DEPOSITED AT DIFFERENT SUBSTRATE TEMPERATURES

被引:34
作者
ROGERS, DJ [1 ]
CHAPMAN, JN [1 ]
BERNARDS, JPC [1 ]
LUITJENS, SB [1 ]
机构
[1] PHILIPS RES LABS,5600 JA EINDHOVEN,NETHERLANDS
关键词
D O I
10.1109/20.42561
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:4180 / 4182
页数:3
相关论文
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