INVESTIGATION OF CR SEGREGATION WITHIN RF-SPUTTERED COCR FILMS

被引：40

作者：

CHAPMAN, JN ^{[1
]}

MCFADYEN, IR ^{[1
]}

BERNARDS, JPC ^{[1
]}

机构：

[1] PHILIPS RES LABS,5600 JA EINDHOVEN,NETHERLANDS

来源：

关键词：

D O I：

10.1016/0304-8853(86)90166-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：359 / 366

页数：8

共 15 条

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[5] Goldstein JI, 1977, SCANNING ELECTRON MI, V1, P315
[6] THE MAGNETIC AND MICROSTRUCTURAL PROPERTIES OF CO-CR THIN-FILMS WITH PERPENDICULAR ANISOTROPY
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[J]. JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 1983, 40 (1-2) : 154 - 162
[7] HOFFMAN H, UNPUB 1985 ICM SAN F
[8] ELEMENTAL SEGREGATION AND MECHANISM OF SPUTTERING IN RF-SPUTTERED CO-CR FILMS
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[J]. JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 1986, 54-7 : 1685 - 1686
[9] KOBAYASHI K, 1981, J APPL PHYS, V52, P2453, DOI 10.1063/1.328964
[10] KYSER DF, 1979, INTRO ANAL ELECTRON, pCH6