INTERACTIVE ELECTRON-ENERGY-LOSS ELEMENTAL MAPPING BY THE IMAGING-SPECTRUM METHOD

We have developed a method which performs chemical imaging with great interactivity between a selected filtered image and the EELS spectrum of a specimen or of a selected area of this specimen. This method, called ''Imaging-Spectrum'', uses the capabilities of the Energy Filtering Transmission Electron Microscopy (EFTEM) fitted with a personal computer. The experiments are performed with a ZEISS CEM 902 coupled with a KONTRON image analysis system. A software has been developed which allows off-line work with an IBM AT Comparison is made between this method and the Spectrum-Imaging technique and the future of filtered imaging is discussed. Experiments were carried out to show the spectral and spatial resolution of this method and dose calculations were achieved. We demonstrate that such a technique is of interest for fast high resolution chemical mapping.