THEORETICAL-STUDY OF THE SECONDARY-ELECTRON EMISSION OF INSULATING TARGETS

被引：90

作者：

GANACHAUD, JP

MOKRANI, A

机构：

[1] Groupe de Physique des Matériaux pour l'Electronique, EA 1153, Laboratoire de Physique du Solide Théorique, Faculté des Sciences et des Techniques, Université de Nantes, 2 Rue de la Houssiniere

来源：

SURFACE SCIENCE | 1995年 / 334卷 / 1-3期

关键词：

ALUMINUM OXIDE; COMPUTER SIMULATIONS; DIELECTRIC PHENOMENA; ELECTRON-SOLID INTERACTIONS; FIELD EFFECT; INSULATING FILMS; SECONDARY ELECTRON EMISSION;

D O I：

10.1016/0039-6028(95)00474-2

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

We study the electron-induced secondary electron emission of insulating targets by a Monte-Carlo simulation method. The most important collision mechanisms in the energy domain considered are investigated. The usual approximations apparently overestimate the elastic collision rate and empirical corrections are proposed. The self-trapping of the charges is explained by the polarization of the surrounding medium. The role of the polaronic effects in the secondary emission as well as the sensibility of the results to the choice of the different parameters are analyzed. The influence of an internal electric field caused by a ''frozen'' charge distribution is also investigated.

引用

页码：329 / 341

页数：13

共 53 条

[1] MONTE-CARLO SIMULATION OF ELECTRON PENETRATION THROUGH THIN-FILMS OF PMMA [J].