MONTE-CARLO SIMULATION OF ELECTRON PENETRATION THROUGH THIN-FILMS OF PMMA

被引：15

作者：

ADESIDA, I ^{[1
]}

SHIMIZU, R ^{[1
]}

EVERHART, TE ^{[1
]}

机构：

[1] UNIV CALIF BERKELEY,ELECTR RES LAB,BERKELEY,CA 94720

来源：

APPLIED PHYSICS LETTERS | 1978年 / 33卷 / 10期

关键词：

D O I：

10.1063/1.90210

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：849 / 850

页数：2

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