LASER-BEAM DEFLECTION MONITORING OF ND-YAG LASER ABLATION - PULSE SHAPE AND REPETITION RATE EFFECTS

被引:3
作者
DIACI, J
MOZINA, J
机构
[1] Faculty of Mechanical Engineering, University of Ljubljana, 61000 Ljubljana
关键词
D O I
10.1016/0169-4332(93)90526-H
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The laser beam deflection probe has been employed to study blast waves generated during ablation of metallic surfaces by sequences of 1.06 mum Nd : YAG laser pulses separated by less than 1 mus. A fluence threshold has been found, below which the effects of individual pulses can be resolved by the laser probe. Above that, the deflection signal has a similar form as if the surface were irradiated with a single pulse. Analysis of the signals in terms of the spherical blast wave theory shows that a pulse sequence generates a weaker blast wave than a single pulse of equal total energy. On the other hand, the sequence yields a higher etch depth than the single pulse.
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页码:321 / 325
页数:5
相关论文
共 13 条
[1]  
DIACI J, 1991, PHYSICAL ACOUSTICS : FUNDAMENTALS AND APPLICATIONS, P291
[2]   SPECTROSCOPIC AND FAST PHOTOGRAPHIC STUDIES OF EXCIMER LASER POLYMER ABLATION [J].
DYER, PE ;
SIDHU, J .
JOURNAL OF APPLIED PHYSICS, 1988, 64 (09) :4657-4663
[3]   THE STUDY OF THE PROCESSES OF LASER-INDUCED VAPORIZATION OF COPPER SURFACE BY TIME-RESOLVED LASER-BEAM DEFLECTION TECHNIQUE [J].
GUO, HP ;
LOU, QH .
OPTICS COMMUNICATIONS, 1990, 77 (5-6) :381-384
[5]  
OKHOTSIMSKY DE, 1962, ZH VYCH MAT MAT FIZ, V2, P107
[6]  
Sedov L I, 1972, SIMILARITY DIMENSION
[7]   LASER-BEAM DEFLECTION AS A PROBE OF LASER ABLATION OF MATERIALS [J].
SELL, JA ;
HEFFELFINGER, DM ;
VENTZEK, P ;
GILGENBACH, RM .
APPLIED PHYSICS LETTERS, 1989, 55 (23) :2435-2437
[8]  
SELL JA, 1990, B AM PHYS SOC, V35, P1528
[9]   ULTRAFAST IMAGING OF ULTRAVIOLET-LASER ABLATION AND ETCHING OF POLYMETHYLMETHACRYLATE [J].
SRINIVASAN, R ;
BRAREN, B ;
CASEY, KG ;
YEH, M .
APPLIED PHYSICS LETTERS, 1989, 55 (26) :2790-2791
[10]  
STURMER E, 1978, J APPL PHYS, V49, P5648, DOI 10.1063/1.324467