ULTRAFAST IMAGING OF ULTRAVIOLET-LASER ABLATION AND ETCHING OF POLYMETHYLMETHACRYLATE

被引：88

作者：

SRINIVASAN, R

BRAREN, B

CASEY, KG

YEH, M

机构：

来源：

APPLIED PHYSICS LETTERS | 1989年 / 55卷 / 26期

关键词：

D O I：

10.1063/1.101910

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2790 / 2791

页数：2

共 9 条

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[9] MECHANISM OF THE ULTRAVIOLET-LASER ABLATION OF POLY(METHYL METHACRYLATE AT 193 AND 248 NM - LASER-INDUCED FLUORESCENCE ANALYSIS, CHEMICAL-ANALYSIS, AND DOPING STUDIES [J].

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