TIME RESOLVED TRANSMISSION STUDIES OF POLY(METHYL METHACRYLATE) FILMS DURING ULTRAVIOLET-LASER ABLATIVE PHOTODECOMPOSITION

被引:62
作者
DAVIS, GM
GOWER, MC
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10.1063/1.338015
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O59 [应用物理学];
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页码:2090 / 2092
页数:3
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共 12 条
[1]   EXCIMER LASER ETCHING OF POLYIMIDE [J].
BRANNON, JH ;
LANKARD, JR ;
BAISE, AI ;
BURNS, F ;
KAUFMAN, J .
JOURNAL OF APPLIED PHYSICS, 1985, 58 (05) :2036-2043
[2]  
BRAREN B, 1983, J VAC SCI TECHNOL B, V3, P913
[3]   EXCIMER LASER LITHOGRAPHY - INTENSITY-DEPENDENT RESIST DAMAGE [J].
DAVIS, GM ;
GOWER, MC .
IEEE ELECTRON DEVICE LETTERS, 1986, 7 (09) :543-545
[4]   SPECTROSCOPIC STUDIES OF ARF LASER PHOTOABLATION OF PMMA [J].
DAVIS, GM ;
GOWER, MC ;
FOTAKIS, C ;
EFTHIMIOPOULOS, T ;
ARGYRAKIS, P .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1985, 36 (01) :27-30
[5]   SELF-DEVELOPING UV PHOTORESIST USING EXCIMER LASER EXPOSURE [J].
DEUTSCH, TF ;
GEIS, MW .
JOURNAL OF APPLIED PHYSICS, 1983, 54 (12) :7201-7204
[6]   EXCIMER LASER ABLATION AND THERMAL COUPLING EFFICIENCY TO POLYMER-FILMS [J].
DYER, PE ;
SIDHU, J .
JOURNAL OF APPLIED PHYSICS, 1985, 57 (04) :1420-1422
[7]   NANOSECOND PHOTOACOUSTIC STUDIES ON ULTRAVIOLET-LASER ABLATION OF ORGANIC POLYMERS [J].
DYER, PE ;
SRINIVASAN, R .
APPLIED PHYSICS LETTERS, 1986, 48 (06) :445-447
[8]   CALORIMETRIC AND ACOUSTIC STUDY OF ULTRAVIOLET-LASER ABLATION OF POLYMERS [J].
GORODETSKY, G ;
KAZYAKA, TG ;
MELCHER, RL ;
SRINIVASAN, R .
APPLIED PHYSICS LETTERS, 1985, 46 (09) :828-830
[9]   EMISSION-SPECTRA AND ETCHING OF POLYMERS AND GRAPHITE IRRADIATED BY EXCIMER LASERS [J].
KOREN, G ;
YEH, JTC .
JOURNAL OF APPLIED PHYSICS, 1984, 56 (07) :2120-2126
[10]   MECHANISM OF THE ULTRAVIOLET-LASER ABLATION OF POLY(METHYL METHACRYLATE AT 193 AND 248 NM - LASER-INDUCED FLUORESCENCE ANALYSIS, CHEMICAL-ANALYSIS, AND DOPING STUDIES [J].
SRINIVASAN, R ;
BRAREN, B ;
DREYFUS, RW ;
HADEL, L ;
SEEGER, DE .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 1986, 3 (05) :785-791