OBLIQUE GROWTH OF IRON THIN-FILMS ON GLASS - A CROSS-SECTIONAL TRANSMISSION ELECTRON-MICROSCOPY STUDY

被引:9
作者
FRECHARD, P
ANDRIEU, S
CHATEIGNER, D
HALLOUIS, M
GERMI, P
PERNET, M
机构
[1] UNIV GRENOBLE 1,CRISTALLOG LAB,CNRS,F-38042 GRENOBLE 09,FRANCE
[2] PONT A MOUSSON SA,DIRECT DEV PROCEDES & PROD,F-54704 PONT A MOUSSON,FRANCE
关键词
GROWTH MECHANISM; IRON; SURFACE MORPHOLOGY; TRANSMISSION ELECTRON MICROSCOPY;
D O I
10.1016/0040-6090(95)06552-0
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Very thin iron columnar layers have been obliquely grown on glass under ultra-high vacuum, and studied by cross-sectional transmission electron microscopy, selected-area electron diffraction and X-ray texture analysis experiments. Micrographs of layers a few tens of nanometres thick have been obtained. For the first time, we put forward the existence of an oblique growth for such thin layers in the case of metals. We discuss the influence of the inclination of the flux, and we compare our results with existing theoretical models. We also describe the influence of other parameters such as the substrate temperature or the divergence of the incident flux. We finally attempt to explain this columnar morphology by means of a Volmer-Weber growth and a shadowing effect.
引用
收藏
页码:42 / 46
页数:5
相关论文
共 16 条
[1]   THE PREPARATION OF CROSS-SECTION SPECIMENS FOR TRANSMISSION ELECTRON-MICROSCOPY [J].
BRAVMAN, JC ;
SINCLAIR, R .
JOURNAL OF ELECTRON MICROSCOPY TECHNIQUE, 1984, 1 (01) :53-61
[2]  
CHATEIGNER D, IN PRESS J APPL CRYS
[3]  
CHATEIGNER D, COMMUNICATION
[4]   USEFUL ANGULAR SELECTIVITY IN OBLIQUE COLUMNAR ALUMINUM [J].
DITCHBURN, RJ ;
SMITH, GB .
JOURNAL OF APPLIED PHYSICS, 1991, 69 (06) :3769-3771
[5]  
FUJIWARA H, 1980, THIN SOLID FILMS, V66, P177, DOI 10.1016/0040-6090(80)90220-5
[6]   DEPENDENCE OF THE COLUMNAR STRUCTURE OF OBLIQUELY EVAPORATED SIOX THIN-FILMS ON THE ANGLE OF DEPOSITION AND THE RATE OF CONDENSATION [J].
GESZTI, O ;
GOSZTOLA, L ;
SEYFRIED, E .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1987, 90 (1-3) :315-318
[7]  
HARA K, 1990, THIN SOLID FILMS, V158, P239
[8]   ALIGNMENT OF COLUMNAR GRAINS IN OBLIQUELY DEPOSITED ALUMINUM FILMS [J].
HASHIMOTO, T ;
OKAMOTO, K ;
HARA, K ;
KAMIYA, M ;
FUJIWARA, H .
THIN SOLID FILMS, 1989, 182 :197-207
[9]   COLUMNAR STRUCTURE OF OBLIQUELY DEPOSITED COBALT FILMS PREPARED AT LOW SUBSTRATE TEMPERATURES [J].
HASHIMOTO, T ;
OKAMOTO, K ;
FUJIWARA, H ;
ITOH, K ;
HARA, K ;
KAMIYA, M .
THIN SOLID FILMS, 1990, 192 (02) :335-342
[10]   PHYSICAL PROBLEMS CONCERNING EFFUSION PROCESSES OF SEMICONDUCTORS IN MOLECULAR-BEAM EPITAXY [J].
HERMAN, MA .
VACUUM, 1982, 32 (09) :555-565