STRUCTURE AND COMPOSITION OF RF REACTIVELY SPUTTERED MOSX FILMS

被引：23

作者：

REICHELT, K

MAIR, G

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1978年 / 49卷 / 03期

关键词：

D O I：

10.1063/1.325014

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1245 / 1247

页数：3

共 9 条

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