LEAK DETECTION IN 10-13 TORR ALUMINUM VACUUM-SYSTEMS

被引：3

作者：

WATANABE, F ^{[1
]}

ISHIMARU, H ^{[1
]}

机构：

[1] NATL LAB HIGH ENERGY PHYS,TSUKUBA,IBARAKI 305,JAPAN

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1990年 / 8卷 / 03期

关键词：

D O I：

10.1116/1.576670

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

10 −13Tonr aluminum vacuum systems with sputter ion pumps, titanium sublimation pumps, and roughing pumps consisting of turbobacked, turbomolecular pumps have been completed. Leak detection has been accomplished by means of the buildup method of helium monitored with a quadrupole residual gas analyzer. The minimum detectable leak rate is below 2 × 10−15Torr /7s. Most leaks below IX 10−10Torr 77s were found in flange joints with aluminum A1G50 H18 gaskets. However, few leaks occurred in flange joints with aluminum A105O H24 gaskets or in feedthroughs, liquid nitrogen shrouds, aluminum alloy-stainless steel transitions, view ports, or electron beam welded parts. © 1990, American Vacuum Society. All rights reserved.

引用

页码：2795 / 2797

页数：3