USE OF NUCLEAR-REACTIONS AND SIMS FOR QUANTITATIVE DEPTH PROFILING OF HYDROGEN IN AMORPHOUS SILICON

被引:57
作者
CLARK, GJ
WHITE, CW
ALLRED, DD
APPLETON, BR
MAGEE, CW
CARLSON, DE
机构
[1] OAK RIDGE NATL LAB,DIV SOLID STATE,OAK RIDGE,TN 37830
[2] RCA,PRINCETON,NJ 08540
关键词
D O I
10.1063/1.89787
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:582 / 585
页数:4
相关论文
共 13 条
  • [11] ELECTROLUMINESCENCE IN AMORPHOUS SILICON
    PANKOVE, JI
    CARLSON, DE
    [J]. APPLIED PHYSICS LETTERS, 1976, 29 (09) : 620 - 622
  • [12] VOOK FL, 1975, REV MOD PHYS, V47
  • [13] WHITEHOUSE DJ, 1974, CHARACTERIZATION SOL, P53