SOME PROPERTIES OF RESI2

被引：16

作者：

KRONTIRAS, C

GRONBERG, L

SUNI, I

DHEURLE, FM

TERSOFF, J

ENGSTROM, I

KARLSSON, B

PETERSSON, CS

机构：

[1] TECH RES CTR FINLAND,SEMICOND LAB,SF-02150 ESPOO,FINLAND

[2] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

[3] UNIV UPPSALA,CHEMIKUM,S-75121 UPPSALA,SWEDEN

[4] ALVKARLEBY LAB,S-81071 ALVKARLEBY,SWEDEN

[5] ROYAL INST TECHNOL,INST MICROWAVE TECHNOL,S-10044 STOCKHOLM 70,SWEDEN

来源：

THIN SOLID FILMS | 1988年 / 161卷

关键词：

D O I：

10.1016/0040-6090(88)90251-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：197 / 206

页数：10

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