HIGH RESPONSIVITY YBA2CU3O7-X MICROBOLOMETERS WITH FAST RESPONSE-TIMES

被引：13

作者：

LI, K

JOHNSON, JE

AKER, BW

机构：

[1] Boeing Defense and Space Group, Seattle

来源：

JOURNAL OF APPLIED PHYSICS | 1993年 / 73卷 / 03期

关键词：

D O I：

10.1063/1.353228

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

To make high-responsivity YBa2Cu3O7-x microbolometers with response times in the tens of microseconds, heat capacity and hence physical size must be small. We measured the responsivities and response times of 2.5X2.5 mum and 10X10 mum YBa2Cu3O7-x microbolometers fabricated on ZrO2 substrates and illuminated by an argon-ion laser focused to a 2 mum spot. Responsivities were found to be 975 and 700 V/W, respectively, with response times of 10 and 40 mus.

引用

页码：1531 / 1533

页数：3

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