THIN-FILM SIC AS AN OPTICAL AND OPTOELECTRONIC MATERIAL

被引：14

作者：

KROTZ, G ^{[1
]}

MULLER, G ^{[1
]}

DERST, G ^{[1
]}

WILBERTZ, C ^{[1
]}

KALBITZER, S ^{[1
]}

机构：

[1] MAX PLANCK INST KERNPHYS,D-69029 HEIDELBERG,GERMANY

来源：

关键词：

D O I：

10.1016/0925-9635(94)90299-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Thin-film SiC in its various crystalline (c-) and amorphous (a-) forms exhibits a number of properties which make these materials interesting for optical and optoelectronic applications. This paper describes the preparation and properties of such films and demonstrates applications with respect to colour detection as well as to optical lithography and data storage.

引用

页码：917 / 921

页数：5

共 17 条

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