OPERATING AND BEAM CHARACTERISTICS, INCLUDING SPECTRAL NARROWING, OF A TEA RARE-GAS HALIDE EXCIMER LASER

被引：22

作者：

MCKEE, TJ ^{[1
]}

BANIC, J ^{[1
]}

JARES, A ^{[1
]}

STOICHEFF, BP ^{[1
]}

机构：

[1] UNIV TORONTO,DEPT PHYS,TORONTO M5S 1A1,ONTARIO,CANADA

来源：

IEEE JOURNAL OF QUANTUM ELECTRONICS | 1979年 / 15卷 / 05期

关键词：

D O I：

10.1109/JQE.1979.1070013

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A simple TEA excimer laser has been developed having a fast discharge with distributed preionization. The output pulses are short (∼7 ns), of high peak power (5–15 MW), and good reproducibility. Narrow linewidth (<1 cm-1), and tunability (∼0.8 nm) have been obtained with KrF using a grating at grazing incidence. Copyright © 1979 by The Institute of Electrical and Electronics Engineers, Inc.

引用

页码：332 / 334

页数：3

共 17 条

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