FIELD-EMISSION FROM SILICON EMITTERS

被引：6

作者：

JOHNSTON, R

MILLER, AJ

机构：

[1] GEC-Marconi Limited, Hirst Research Centre, Wembley, Middlesex, East Lane

来源：

SURFACE SCIENCE | 1992年 / 266卷 / 1-3期

关键词：

D O I：

10.1016/0039-6028(92)91013-2

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Miniature silicon field emission cathodes are being produced as part of a research programme in Vacuum Microelectronics. Results are presented on chemical and ion bombardment treatment of the tips. Total emission current and field emission energy spectra are measured as a function of the treatments. Although methods of obtaining emission from clean silicon microemitters have been demonstrated, field emission spectra show rapid recontamination effects. The strong changes in the spectra are explained with the aid of a model which invokes resonant tunnelling through absorbate layers.

引用

页码：155 / 162

页数：8

共 9 条

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