THIN-FILMS FOR GAS SENSORS

Thin tin dioxide films are used as sensitive elements for gas sensors. The physical properties of such materials and their electrical performance largely depend on their methods of production. This work presents two methods used to produce thin dioxide films, i.e., chemical vapour deposition and reactive evaporation. Optimization of the deposition parameters enables us to process highly sensitive materials and even materials able to discriminate between certain gases, such as alcohol, benzene or hydrogen sulphide.